Investigation of fluoride layer of yttria coatings prepared by aerosol deposition method

The fluorination of Yttria (Y2O3) coatings in the inner chamber wall a plasma-etching equipment causes process drift. In this paper, we investigate relationship between microstructure and fluoride layer Y2O3 prepared by aerosol deposition (AD) method compared with atmospheric plasma spraying (APS) ion plating (IP). corrosion AD-coating, which has highly dense without any pores, proceeded homogeneously specific surface area maintained its initial smooth surface. Moreover, F atoms slightly penetrated AD-coating formed very thin, 45-nm after exposure. total did not increase exposure time because remained smooth. Therefore, coating AD can suppress drift APS IP.